A packed bed scrubber for semiconductor acid-gas exhaust is a counter-current wet scrubber that absorbs HCl, HF and other acids from etch, wet-clean and CVD tool exhaust. This guide covers which of the four fab stream classes belong on a packed-bed scrubber, how the tower captures acid gas and when it fits, HCl versus HF design differences, normal-versus-peak design basis, tower parameters, material and temperature boundaries, demisting, redundancy, monitoring, and a worked example that ends in a 12-field design input sheet you can hand to a supplier.